Materials fundamentals of gate dielectrics
Materials Fundamentals of Dielectric Gates treats materials fundamentals of the novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scaling of the CMOS devices.
| Other Authors: | Demkov, Alexander A., Navrotsky, Alexandra., SpringerLink (Online service) |
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| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer,
©2005.
Dordrecht : [2005] |
| Physical Description: |
1 online resource (viii, 475 pages) : illustrations. |
| Series: |
Advances in mathematics (Springer Science+Business Media) ;
v. 9. |
| Subjects: |
| Summary: |
Materials Fundamentals of Dielectric Gates treats materials fundamentals of the novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scaling of the CMOS devices. |
|---|---|
| Item Description: |
Includes bibliographical references and index. Materials Fundamentals of Dielectric Gates treats materials fundamentals of the novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scaling of the CMOS devices. Materials and Physical Properties of High-K Oxide Films; Device Principles of High-K Dielectrics; Thermodynamics of Oxide Systems Relevant to Alternative Gate Dielectrics; Electronic Structure and Chemical Bonding in High-k Transition Metal and Lanthanide Series Rare Earth Alternative Gate Dielectrics: Applications to Direct Tunneling and Defects at Dielectric Interface; Atomic Structure, Interfaces and Defects of High Dielectric Constant Gate Oxides; Dielectric Properties of Simple and Complex Oxides from First Principles; IVb Transition Metal Oxides and Silicates: An Ab Initio Study. The Interface Phase and Dielectric Physics for Crystalline Oxides on SemiconductorsInterfacial Properties of Epitaxial Oxide/Semiconductor Systems; Functional Structures; Mechanistic Studies of Dielectric Growth on Silicon; Methodology for Development of High-. Stacked Gate Dielectrics on III-V Semiconductors. Available to OhioLINK libraries. |
| Physical Description: |
1 online resource (viii, 475 pages) : illustrations. |
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
9781402030789 1402030789 1280610948 9781280610943 6610610940 9786610610945 1402030770 9781402030772 |
| Access: |
Available to OhioLINK libraries. |