Materials fundamentals of gate dielectrics
Materials Fundamentals of Dielectric Gates treats materials fundamentals of the novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scaling of the CMOS devices.
| Other Authors: | Demkov, Alexander A., Navrotsky, Alexandra., SpringerLink (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer,
©2005.
Dordrecht : [2005] |
| Physical Description: |
1 online resource (viii, 475 pages) : illustrations. |
| Series: |
Advances in mathematics (Springer Science+Business Media) ;
v. 9. |
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |