Workshop on temperature measurement of semiconductor wafers using thermocouples
Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing a...
| Corporate Authors: | Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples NIST) |
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| Other Authors: | Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples, Kreider, Kenneth G., National Institute of Standards and Technology (U.S.) |
| Format: | Microfilm |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
[2001]
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| Physical Description: |
1 volume (various pagings) : illustrations ; 28 cm. |
| Series: |
NISTIR ;
6566. |
| Subjects: |
| Summary: |
Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing and how to achieve the highest accuracy. |
|---|---|
| Item Description: |
"January 5, 2001." Shipping list no.: 2003-0523-M. Includes bibliographical references. Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing and how to achieve the highest accuracy. Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2002. 2 microfiches : negative.. s2002 dcun b. |
| Physical Description: |
1 volume (various pagings) : illustrations ; 28 cm. |
| Bibliography: |
Includes bibliographical references. |