Workshop on temperature measurement of semiconductor wafers using thermocouples

Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing a...

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Bibliographic Details
Corporate Authors: Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples NIST, National Institute of Standards and Technology (U.S.)
Other Authors: Kreider, Kenneth G.
Format: Government Document Conference Proceeding Microfilm Book
Language:English
Published: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2001]
Series:NISTIR ; 6566.
Physical Description:
1 volume (various pagings) : illustrations ; 28 cm.
Subjects:
Thermocouples -- Industrial applications -- Congresses.
Semiconductor wafers -- Thermal properties -- Measurement -- Congresses.
Holdings details from CMU Storage Gov Pub Microfiche C502
Copy 1 CMU Storage Gov Pub Microfiche C 13.58:6566 Available

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