Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples, Kreider, K. G., & National Institute of Standards and Technology (U.S.). (2001). Workshop on temperature measurement of semiconductor wafers using thermocouples. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.
Chicago Style (17th ed.) CitationWorkshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples, Kenneth G. Kreider, and National Institute of Standards and Technology (U.S.). Workshop On Temperature Measurement of Semiconductor Wafers Using Thermocouples. Gaithersburg, MD: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 2001.
MLA (8th ed.) CitationWorkshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples, et al. Workshop On Temperature Measurement of Semiconductor Wafers Using Thermocouples. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 2001.