Showing 1 - 1 of 1 for search: 'Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples', query time: 0.07s
Published: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 2001
Description: 1 volume (various pagings) : illustrations ; 28 cm.
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Semiconductor wafers Thermal properties Measurement Thermocouples Industrial applications