Description: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

Main Author:	Potzick, James E.
Other Authors:	National Institute of Standards and Technology (U.S.)
Format:	Microfilm
Language:	English
Published:	Gaithersburg, MD : Washington : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1997.
Physical Description:	xiii, 23 pages : illustrations ; 28 cm.
Series:	NIST special publication ; 260-129. Standard reference materials.
Subjects:	Microscopes -- Calibration -- Standards. Integrated circuits -- Masks -- Measurement. Chromium -- Spectra -- Standards.

Item Description:	Distributed to depository libraries in microfiche. Shipping list no.: 98-0086-M. Includes bibliographical references (pages 17-18). Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.
Physical Description:	xiii, 23 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references (pages 17-18).