Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
| Main Author: | Vezzetti, Carol F. |
|---|---|
| Other Authors: | Varner, Ruth N., Potzick, James E., National Institute of Standards and Technology (U.S.) |
| Format: | Microfilm |
| Language: | English |
| Published: |
Gaithersburg, MD : [Springfield, VA] :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; [Order from National Technical Information Service],
1992.
|
| Physical Description: |
xi, 37 pages : illustrations ; 28 cm. |
| Series: |
Standard reference materials.
NIST special publication ; 260-117. |
| Subjects: |
CMU Storage Gov Pub Microfiche
| Location | Call Number: | Status |
|---|---|---|
| CMU Storage Gov Pub Microfiche | C 13.10:260-117 | Available |