Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
| Main Author: | Potzick, James E. |
|---|---|
| Other Authors: | National Institute of Standards and Technology (U.S.) |
| Format: | Microfilm |
| Language: | English |
| Published: |
Gaithersburg, MD : Washington :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1997.
|
| Physical Description: |
xiii, 23 pages : illustrations ; 28 cm. |
| Series: |
NIST special publication ;
260-129. Standard reference materials. |
| Subjects: |
CMU Storage Gov Pub Microfiche
| Location | Call Number: | Status |
|---|---|---|
| CMU Storage Gov Pub Microfiche | C 13.10:260-129 | Available |