Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems standard reference materials /

Main Author: Vezzetti, Carol F.
Other Authors: Varner, Ruth N., Potzick, James E., National Institute of Standards and Technology (U.S.)
Format: Book
Language: English
Published: Gaithersburg, MD : [Springfield, VA :] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; [Order from National Technical Information Service], [1992]
Physical Description: 1 volume.
Series: NIST special publication ; 260-119.
Subjects:

CMU Storage Gov Pub Microfiche

LocationCall Number: Status
CMU Storage Gov Pub Microfiche C 13.10:260-119 Available