Description: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

Main Author:	Vezzetti, Carol F.
Other Authors:	Varner, Ruth N., Potzick, James E., National Institute of Standards and Technology (U.S.)
Format:	Book
Language:	English
Published:	Gaithersburg, MD : [Springfield, VA :] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; [Order from National Technical Information Service], [1992]
Physical Description:	1 volume.
Series:	NIST special publication ; 260-119.
Subjects:	Microscopes -- Calibration -- Standards. Integrated circuits -- Masks -- Measurement. Chromium -- Spectra -- Standards.

Item Description:	Distributed to depository libraries in microfiche. Shipping list no.: 92-2587-M. Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative.
Physical Description:	1 volume.