Holdings: Silicon microelectronics programs at the National Institute of Standards and Technology

Other Authors:	National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs., National Institute of Standards and Technology (U.S.)
Format:	Microfilm
Language:	English
Published:	[Gaithersburg, MD] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.
Physical Description:	volumes : illustrations.
Series:	NISTIR.
Subjects:	National Institute of Standards and Technology (U.S.). -- Office of Microelectronics Programs -- Periodicals. Semiconductors -- Measurement -- Periodicals. Semiconductors -- Standards -- United States -- Periodicals. Semiconductors -- Research -- United States -- Periodicals. Semiconductor industry -- Government policy -- United States -- Periodicals.

Location	Call Number:	Status
CMU Storage Gov Pub Microfiche	C 13.58/2:	Available