Description: Silicon microelectronics programs at the National Institute of Standards and Technology

Other Authors:	National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs., National Institute of Standards and Technology (U.S.)
Format:	Microfilm
Language:	English
Published:	[Gaithersburg, MD] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.
Physical Description:	volumes : illustrations.
Series:	NISTIR.
Subjects:	National Institute of Standards and Technology (U.S.). -- Office of Microelectronics Programs -- Periodicals. Semiconductors -- Measurement -- Periodicals. Semiconductors -- Standards -- United States -- Periodicals. Semiconductors -- Research -- United States -- Periodicals. Semiconductor industry -- Government policy -- United States -- Periodicals.

Item Description:	Description based on: June 2000. Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., microfiches : negative.. c19uu9999dcuarb.
Physical Description:	volumes : illustrations.
Publication Frequency:	Annual.