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02748cas a2200625 a 4500 |
| 001 |
46861214 |
| 003 |
OCoLC |
| 005 |
20210309124654.0 |
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|a 962898516
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|a GAO
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|a C 13.58:
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|a C 13.1/12-2:
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2 |
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|a National Institute of Standards and Technology (U.S.).
|b Office of Microelectronics Programs.
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| 245 |
1 |
0 |
|a Programs, activities, and accomplishments /
|c Office of Microelectronics Programs.
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| 260 |
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|a [Gaithersburg, Md.] :
|b U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.
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| 300 |
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|a volumes.
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| 310 |
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|a Annual.
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| 336 |
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|a text
|b txt
|2 rdacontent.
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| 337 |
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|a microform
|b h
|2 rdamedia.
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| 338 |
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|a microfiche
|b he
|2 rdacarrier.
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| 362 |
1 |
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|a Ceased publication.
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| 490 |
1 |
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|a NISTIR.
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| 533 |
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|a Microfiche.
|m <2001>-2002.
|b [Washington, D.C.] :
|c Supt. of Docs., U.S. G.P.O.
|e microfiches : negative.
|7 d199u2002dcuarb.
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| 500 |
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|a GPO Cataloging Record Distribution Program (CRDP).
|
| 588 |
0 |
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|a 2001.
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| 610 |
2 |
0 |
|a National Institute of Standards and Technology (U.S.).
|b Office of Microelectronics Programs
|v Periodicals.
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| 650 |
|
0 |
|a Semiconductor industrial equipment industry
|x Government policy
|z United States
|v Periodicals.
|
| 650 |
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0 |
|a Semiconductors
|x Measurement
|v Periodicals.
|
| 610 |
2 |
7 |
|a National Institute of Standards and Technology (U.S.).
|b Office of Microelectronics Programs.
|2 fast.
|
| 650 |
|
7 |
|a Semiconductors
|x Measurement.
|2 fast.
|
| 651 |
|
7 |
|a United States.
|2 fast.
|
| 655 |
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7 |
|a Periodicals.
|2 fast.
|
| 655 |
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7 |
|a Periodicals.
|2 lcgft.
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| 776 |
0 |
8 |
|i Online version:
|a National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs.
|s Programs, activities and accomplishments (Online)
|w (DLC) 2003230323
|w (OCoLC)51971767.
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| 830 |
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|a NISTIR.
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| 907 |
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| 998 |
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|a cug
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|g mdu
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| 948 |
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|a MARCIVE Comp, in 2022.12
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| 948 |
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|a MARCIVE Over, 05/2021
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| 948 |
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|a MARCIVE August, 2017
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| 948 |
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|a MARCIVE extract Aug 5, 2017
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| 995 |
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|a Loaded with m2btab.ltiac in 2022.12
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| 995 |
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|a Loaded with m2btab.ltiac in 2021.05
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| 995 |
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|a Loaded with m2btab.b in 2021.04
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| 995 |
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|a Loaded with m2btab.ltiac in 2017.08
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| 995 |
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|a OCLC offline update by CMU
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| 989 |
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|a C 13.1/12-2:
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