Description: Programs, activities, and accomplishments

Main Author:	National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs.
Format:	Microfilm
Language:	English
Published:	[Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.
Physical Description:	volumes.
Series:	NISTIR.
Subjects:	National Institute of Standards and Technology (U.S.). -- Office of Microelectronics Programs -- Periodicals. Semiconductor industrial equipment industry -- Government policy -- United States -- Periodicals. Semiconductors -- Measurement -- Periodicals.

Published:	Ceased publication.
Item Description:	Microfiche. <2001>-2002. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O. microfiches : negative. d199u2002dcuarb. GPO Cataloging Record Distribution Program (CRDP).
Physical Description:	volumes.
Publication Frequency:	Annual.