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Subject
4
Integrated circuits Masks Measurement
3
Chromium Spectra Standards
3
Microscopes Calibration Standards
2
Integrated circuits Masks
1
Copyright
1
Design protection
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1
Integrated circuits Design and construction
1
Lithography
1
Masks (Electronics)
1
Optical instruments Calibration
1
Self-assembly (Chemistry)
1
Semiconductors
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Author
3
National Institute of Standards and Technology (U.S.)
3
Potzick, James E.
2
Varner, Ruth N.
2
Vezzetti, Carol F.
1
Center for Applied Mathematics (U.S.). Statistical Engineering Division,
1
Croarkin, Carroll,
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1
Library of Congress. Copyright Office
1
Shim, Seongbo,
1
Shin, Youngsoo,
1
SpringerLink (Online service)
1
Varner, Ruth N.,
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