Measurement assurance for dimensional measurements on integrated-circuit photomasks
| Main Author: | Croarkin, Carroll, |
|---|---|
| Other Authors: | Varner, Ruth N.,, Center for Applied Mathematics (U.S.). Statistical Engineering Division, |
| Format: | Microfilm |
| Language: | English |
| Published: |
Washington, D.C. :
U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O.,
1982.
|
| Physical Description: |
44 pages in various pagings : illustrations ; 28 cm. |
| Series: |
NBS technical note ;
1164. |
| Subjects: |
CMU Storage Gov Pub Microfiche
| Location | Call Number: | Status |
|---|---|---|
| CMU Storage Gov Pub Microfiche | C 13.46:1164 | Available |