Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems

Main Author: Vezzetti, Carol F.
Other Authors: Varner, Ruth N., Potzick, James E., National Institute of Standards and Technology (U.S.)
Format: Book
Language: English
Published: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1991.
Physical Description: xii, 33 pages : illustrations ; 28 cm.
Series: Standard reference materials.
NIST special publication ; 260-114.
Subjects:

CMU Storage Gov Pub Microfiche

LocationCall Number: Status
CMU Storage Gov Pub Microfiche C 13.10:260-114 Available