High permittivity gate dielectric materials
"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, me...
| Other Authors: | Kar, S. 1942-, SpringerLink (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
©2013.
Berlin ; New York : [2013] |
| Physical Description: |
1 online resource. |
| Series: |
Springer series in advanced microelectronics ;
v. 43. |
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |