Handbook of low and high dielectric constant materials and their applications
Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made...
Other Authors: | Nalwa, Hari Singh, 1954-, ScienceDirect (Online service) |
---|---|
Format: | eBook |
Language: | English |
Published: |
San Diego :
Academic Press,
[1999]
|
Physical Description: |
1 online resource (2 volumes) : illustrations. |
Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
---|---|---|
CMU Electronic Access | Available |