Handbook of low and high dielectric constant materials and their applications

Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made...

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Other Authors: Nalwa, Hari Singh, 1954-, ScienceDirect (Online service)
Format: eBook
Language: English
Published: San Diego : Academic Press, [1999]
Physical Description: 1 online resource (2 volumes) : illustrations.
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