National Semiconductor Metrology Program [catalog] /
Previous Title: |
National Institute of Standards and Technology. Semiconductor measurement technology |
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Main Author: | National Semiconductor Metrology Program (U.S.) |
Other Authors: | Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology), National Institute of Standards and Technology (U.S.), National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs. |
Format: | Serial |
Language: | English |
Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995-
|
Physical Description: |
volumes ; 28 cm. Titles for the latest year (not cumulative) also available via Internet from the EEEL web site. Address as of 9/8/00: http://www.eeel.nist.gov/810.01/; current access is available via PURL. |
Series: |
NIST list of publications ;
103. |
Subjects: | |
Online Access: |
click on "Publications" to view publications for the most recent year |
click on "Publications" to view publications for the most recent year
CMU Storage Gov Pub
Location | Call Number: | Status |
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CMU Storage Gov Pub | C 13.37:103/2000 | Available |