Plasma sources for thin film deposition and etching
| Other Authors: | Francombe, Maurice H.,, Vossen, John L.,, ScienceDirect (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
San Diego, CA. :
Academic Press,
1994.
|
| Physical Description: |
1 online resource (xiii, 397 pages) : illustrations. |
| Series: |
Physics of thin films ;
volume 18. |
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |