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Plasma sources for thin film deposition and etching
Saved in:
Corporate Author: | |
---|---|
Other Authors: | , |
Format: | eBook |
Language: | English |
Published: |
San Diego, CA. :
Academic Press,
1994.
|
Series: | Physics of thin films ;
volume 18. |
Physical Description: |
1 online resource (xiii, 397 pages) : illustrations. |
Subjects: | |
Online Access: | Elsevier - Click here for access |
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