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Plasma sources for thin film deposition and etching
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
San Diego, CA. :
Academic Press,
1994.
|
| Series: | Physics of thin films ;
volume 18. |
| Physical Description: |
1 online resource (xiii, 397 pages) : illustrations. |
| Subjects: | |
| Online Access: | Elsevier - Click here for access |
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