Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon
| Other Authors: | Candela, G. A., National Institute of Standards and Technology (U.S.) |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
[1988]
|
| Physical Description: |
x, 37 pages : illustrations ; 28 cm. |
| Series: |
Standard reference materials.
NIST special publication ; 260-109. |
| Subjects: |