Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides
| Other Authors: | Gladden, Warren K., National Institute of Standards and Technology (U.S.) |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Gaithersburg, MD : [Springfield, VA :] :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; [Order from National Technical Information Service],
[1988]
|
| Physical Description: |
iii, 66 pages : illustrations ; 28 cm. |
| Series: |
Semiconductor measurement technology.
NIST special publication ; 400-81. |
| Subjects: |
CMU Storage Gov Pub Microfiche
| Location | Call Number: | Status |
|---|---|---|
| CMU Storage Gov Pub Microfiche | C 13.10:400-81 | Available |