User's manual for the program MONSEL-1 Monte Carlo simulation of SEM signals for linewidth metrology /
Main Author: | Lowney, J. R. 1946- |
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Other Authors: | Marx, Egon., National Institute of Standards and Technology (U.S.) |
Format: | Microfilm |
Language: | English |
Published: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1994.
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Physical Description: |
iv, 39 pages : illustrations ; 28 cm. |
Series: |
Semiconductor measurement technology.
NIST special publication ; 400-95. |
Subjects: |
CMU Storage Gov Pub Microfiche
Location | Call Number: | Status |
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CMU Storage Gov Pub Microfiche | C 13.10:400-95 | Available |