User's manual for the program MONSEL-1 Monte Carlo simulation of SEM signals for linewidth metrology /

Main Author: Lowney, J. R. 1946-
Other Authors: Marx, Egon., National Institute of Standards and Technology (U.S.)
Format: Microfilm
Language: English
Published: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1994.
Physical Description: iv, 39 pages : illustrations ; 28 cm.
Series: Semiconductor measurement technology.
NIST special publication ; 400-95.
Subjects:

CMU Storage Gov Pub Microfiche

LocationCall Number: Status
CMU Storage Gov Pub Microfiche C 13.10:400-95 Available