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Lowney, J. R. 1946-
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User's manual for the program MONSEL-1 Monte Carlo simulation of SEM signals for linewidth metrology
by
Lowney
,
J
.
R
.
1946
-
Published: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1994
Description: iv, 39 pages : illustrations ; 28 cm.
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Related Subjects
Electrons Scattering Computer simulation
Monte Carlo method Computer programs
Scanning electron microscopy Computer programs
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