Handbook of silicon based MEMS materials & technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...
| Other Authors: | Lindroos, Veikko., ScienceDirect (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010.
Norwich, N.Y. : Oxford : 2010. |
| Physical Description: |
1 online resource. |
| Series: |
Micro & nano technologies.
|
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |