A user's guide to ellipsometry

This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties...

Full description

Main Author: Tompkins, Harland G.
Other Authors: ScienceDirect (Online service)
Format: eBook
Language: English
Published: Boston : Academic Press, [1993]
Physical Description: 1 online resource (xv, 260 pages) : illustrations.
Subjects:

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