A user's guide to ellipsometry
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties...
Main Author: | Tompkins, Harland G. |
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Other Authors: | ScienceDirect (Online service) |
Format: | eBook |
Language: | English |
Published: |
Boston :
Academic Press,
[1993]
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Physical Description: |
1 online resource (xv, 260 pages) : illustrations. |
Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
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CMU Electronic Access | Available |