Thin films by chemical vapour deposition
The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several uniqu...
| Uniform Title: | Depunerea chimică din vapori a straturilor subțiri. English |
|---|---|
| Main Author: | Moroșanu, C. E. |
| Other Authors: | ScienceDirect (Online service) |
| Format: | eBook |
| Language: | English Romanian |
| Published: |
Amsterdam ; New York : Bucharest, Romania :
Elsevier ; Editura Tehnică,
1990.
|
| Physical Description: |
1 online resource (717 pages) : illustrations. |
| Series: |
Thin films science and technology ;
7. |
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |