Interlayer dielectrics for semiconductor technologies
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...
| Other Authors: | Murarka, S. P., Eizenberg, M., Sinha, A. K., ScienceDirect (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston :
Elsevier/Academic Press,
2003.
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| Physical Description: |
1 online resource (xiv, 444 pages) : illustrations. |
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |