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Thin film processes II
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to t...
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| Corporate Author: | |
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Academic Press,
[1991]
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| Series: | Thin film processes ;
2. |
| Physical Description: |
1 online resource (xiii, 866 pages) : illustrations. |
| Subjects: | |
| Online Access: | Elsevier - Click here for access |
| Copy 1 | CMU Electronic Access | Online |
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