Piezoelectric MEMS resonators
"This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future res...
| Other Authors: | Bhugra, Harmeet,, Piazza, Gianluca,, SpringerLink (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Cham, Switzerland :
Springer Nature,
[2017]
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| Physical Description: |
1 online resource (424 pages) : illustrations. |
| Series: |
Microsystems and nanosystems.
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| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |