Influence of substrate temperature and hydrogen dilution ration on the properties of nanocrystalline silicon thin films grown by hot-wire chemical vapor deposition preprint /

Other Authors: Moutinho, Helio R., National Renewable Energy Laboratory (U.S.)
Format: Electronic
Language: English
Published: Golden, Colo. : National Renewable Energy Laboratory, [2003]
Series: Conference paper (National Renewable Energy Laboratory (U.S.)) ; NREL/CP-520-33929.
Subjects:
Online Access: http://purl.access.gpo.gov/GPO/LPS49135
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