Interferometric metrology of photomask blanks approaches using 633 nm wavelength /

"The purpose of this report is to describe interferometric measurements of photomask blanks that could be made at the National Institute of Standards and Technology (NIST) using existing equipment without the use of coatings which must subsequently be removed"--P. 2.

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Bibliographic Details
Corporate Author: National Institute of Standards and Technology (U.S.)
Other Authors: Evans, CJ
Format: Microfilm Book
Language:English
Published: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2002]
Series:NISTIR ; 6701.
Physical Description:
11 pages : illustrations ; 28 cm.
Subjects:
Interferometry.
Photolithography.
Optical measurements.
Optical instruments -- Testing.
Holdings details from CMU Storage Gov Pub Microfiche C502
Copy 1 CMU Storage Gov Pub Microfiche C 13.58:6701 Available

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