Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2
| Main Author: | Marshall, J. C. |
|---|---|
| Other Authors: | Mattis, Richard L., National Institute of Standards and Technology (U.S.) |
| Format: | Microfilm |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
[1992]
|
| Physical Description: |
iv, 140 pages : illustrations ; 28 cm. |
| Series: |
Semiconductor measurement technology.
NIST special publication ; 400-90. |
| Subjects: |
CMU Storage Gov Pub Microfiche
| Location | Call Number: | Status |
|---|---|---|
| CMU Storage Gov Pub Microfiche | C 13.10:400-90 | Available |