Handbook of chemical vapor deposition (CVD) principles, technology, and applications /

Main Author: Pierson, Hugh O.
Other Authors: ScienceDirect (Online service)
Format: eBook
Language: English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, [1992]
Physical Description: 1 online resource (xxii, 436 pages) : illustrations.
Subjects:

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