Handbook of chemical vapor deposition (CVD) principles, technology, and applications /
Main Author: | Pierson, Hugh O. |
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Other Authors: | ScienceDirect (Online service) |
Format: | eBook |
Language: | English |
Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1992]
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Physical Description: |
1 online resource (xxii, 436 pages) : illustrations. |
Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
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CMU Electronic Access | Available |