Photonic waveguide components on silicon substrate modeling and experiments /
This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices using the effective index based matrix method. Various fabrication techniques like laser direct writing (LDW), Focused Ion Beam (FIB) and optical lithography are discussed. FIB lithography has been ex...
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| Main Author: |
Samanta, Swagata, |
| Other Authors: |
Banerji, Pallab,, Ganguly, Pranabendu,, SpringerLink (Online service) |
| Format: |
eBook
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| Language: |
English
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| Published: |
Singapore :
Springer,
2020.
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| Physical Description: |
1 online resource (xvii, 100 pages).
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| Series: |
SpringerBriefs in applied sciences and technology. Manufacturing and surface engineering.
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| Subjects: |
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