Helium ion microscopy
This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are di...
Other Authors: | Hlawacek, Gregor,, Gölzhäuser, Armin,, SpringerLink (Online service) |
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Format: | eBook |
Language: | English |
Published: |
[Cham] :
Springer,
2016.
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Physical Description: |
1 online resource (xxiii, 526 pages) : color illustrations. |
Series: |
Nanoscience and technology.
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Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
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CMU Electronic Access | Available |