Micro/nano integrated fabrication technology and its applications in microenergy harvesting

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...

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Main Author: Zhang, Xiao-Sheng,
Other Authors: SpringerLink (Online service)
Format: eBook
Language: English
Published: Berlin : Springer, 2016.
Berlin : 2016.
Physical Description: 1 online resource.
Series: Springer theses.
Subjects:

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