Micro/nano integrated fabrication technology and its applications in microenergy harvesting
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...
Main Author: | Zhang, Xiao-Sheng, |
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Other Authors: | SpringerLink (Online service) |
Format: | eBook |
Language: | English |
Published: |
Berlin :
Springer,
2016.
Berlin : 2016. |
Physical Description: |
1 online resource. |
Series: |
Springer theses.
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Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
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CMU Electronic Access | Available |