Handbook of silicon wafer cleaning technology
The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with...
| Other Authors: | Reinhardt, Karen A., Kern, Werner, 1925-, ScienceDirect (Online service) |
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| Format: | eBook |
| Language: | English |
| Published: |
Norwich, NY :
William Andrew,
[2008]
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| Physical Description: |
1 online resource (xxvi, 718 pages) : illustrations. |
| Edition: | 2nd ed. |
| Series: |
Materials science and process technology series.
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| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |