Advanced mechatronics and MEMS devices
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...
| Other Authors: | Zhang, Dan, 1964-, SpringerLink (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
New York, NY :
Springer,
©2013.
New York, NY : [2013] |
| Physical Description: |
1 online resource : illustrations (some color). |
| Series: |
Microsystems (Series) ;
23. |
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |