Silicon carbide microsystems for harsh environments
This book reviews state-of-the-art Silicon Carbide (SiC) technologies. It includes reviews of MEMS devices and provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
| Main Author: | Wijesundara, Muthu B. J. |
|---|---|
| Other Authors: | Azevedo, Robert G., SpringerLink (Online service) |
| Format: | eBook |
| Language: | English |
| Published: |
New York :
Springer,
©2011.
New York : [2011] |
| Physical Description: |
1 online resource (xv, 232 pages) : illustrations. |
| Series: |
MEMS reference shelf.
|
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |