Laser precision microfabrication
Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision...
Other Authors: | Sugioka, Kōji., Meunier, Michel, 1956-, Piqué, Alberto., SpringerLink (Online Service) |
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Format: | eBook |
Language: | English |
Published: |
Heidelberg ; New York :
Springer-Verlag,
©2010.
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Physical Description: |
1 online resource (xvi, 344 pages) : illustrations (some color) |
Series: |
Springer series in materials science ;
v. 135. |
Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
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CMU Electronic Access | Available |