Laser precision microfabrication

Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision...

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Other Authors: Sugioka, Kōji., Meunier, Michel, 1956-, Piqué, Alberto., SpringerLink (Online Service)
Format: eBook
Language: English
Published: Heidelberg ; New York : Springer-Verlag, ©2010.
Physical Description: 1 online resource (xvi, 344 pages) : illustrations (some color)
Series: Springer series in materials science ; v. 135.
Subjects:

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