Design for manufacturability and yield for nano-scale CMOS
Talks about the various aspects of manufacturability and yield in a nano-CMOS process and how to address each aspect at the proper design step starting with the design and layout of standard cells. This book is suitable for practicing IC designer and for graduate students intent on having a career i...
| Main Author: | Chiang, Charles, 1958- |
|---|---|
| Other Authors: | Kawa, Jamil., SpringerLink (Online service) |
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer,
©2007.
Dordrecht : [2007] |
| Physical Description: |
1 online resource (xxvii, 254 pages) : illustrations. |
| Series: |
Series on integrated circuits and systems.
|
| Subjects: |
Table of Contents:
- Random Defects
- Systematic Yield
- Lithography
- Systematic Yield
- Chemical Mechanical Polishing (CMP)
- Variability & Parametric Yield
- Design for Yield
- Yield Prediction
- Conclusions.