Fundamentals of nanoscale film analysis
Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on anal...
Main Author: | Alford, Terry L. |
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Other Authors: | Feldman, Leonard C., Mayer, James W., 1930-, SpringerLink (Online service) |
Format: | eBook |
Language: | English |
Published: |
New York, N.Y. ; London :
Springer,
©2007.
New York, N.Y. ; London : [2007] |
Physical Description: |
1 online resource (xiv, 336 pages) : illustrations. |
Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
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CMU Electronic Access | Available |