National Semiconductor Metrology Program [catalog] /
| Previous Title: |
National Institute of Standards and Technology. Semiconductor measurement technology |
|---|---|
| Main Author: | National Semiconductor Metrology Program (U.S.) |
| Other Authors: | Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology), National Institute of Standards and Technology (U.S.), National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs. |
| Format: | Serial |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995-
|
| Physical Description: |
volumes ; 28 cm. Titles for the latest year (not cumulative) also available via Internet from the EEEL web site. Address as of 9/8/00: http://www.eeel.nist.gov/810.01/; current access is available via PURL. |
| Series: |
NIST list of publications ;
103. |
| Subjects: | |
| Online Access: |
click on "Publications" to view publications for the most recent year |
click on "Publications" to view publications for the most recent year
CMU Storage Gov Pub
| Location | Call Number: | Status |
|---|---|---|
| CMU Storage Gov Pub | C 13.37:103/2000 | Available |