The science and engineering of microelectronic fabrication
| Main Author: | Campbell, Stephen A., 1954- |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press,
1996.
|
| Physical Description: |
xv, 536 pages : illustrations ; 25 cm. |
| Series: |
Oxford series in electrical engineering.
|
| Subjects: |
CMU Main Books 3rd Floor
| Location | Call Number: | Status |
|---|---|---|
| CMU Main Books 3rd Floor | TK7871.85 .C25 1996 |
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