Outlook and challenges of nano devices, sensors, and MEMS
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...
| Other Authors: | Li, Ting., Liu, Ziv., SpringerLink (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Cham :
Springer,
[2017]
|
| Physical Description: |
1 online resource (xvi, 521 pages) : illustrations (some color) |
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |