Introduction to focused ion beams instrumentation, theory, techniques, and practice /
"Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand w...
Other Authors: | Giannuzzi, Lucille A., Stevie, F. A., SpringerLink (Online Service) |
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Format: | eBook |
Language: | English |
Published: |
New York :
Springer,
©2005.
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Physical Description: |
1 online resource (xiv, 357 pages) : illustrations. |
Subjects: |
CMU Electronic Access
Electronic Resource Click HereLocation | Call Number: | Status |
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CMU Electronic Access | Available |